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US Patent 11289307 Impedance matching network and method

OverviewStructured DataIssuesContributors
Is a
Patent
Patent
Date Filed
July 22, 2020
Date of Patent
March 29, 2022
Patent Application Number
16935600
Patent Citations
‌
US Patent 10483090 Restricted capacitor switching
0
‌
US Patent 10269540 Impedance matching system and method of operating the same
Patent Citations Received
‌
US Patent 11804362 Frequency tuning for modulated plasma systems
Patent Inventor Names
Imran Ahmed Bhutta
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
11289307
Patent Primary Examiner
‌
Stephen E. Jones
CPC Code
‌
H01J 2237/332
‌
H01J 2237/334
‌
H03H 7/40
‌
H03H 7/38
‌
H01L 21/02274
‌
H03H 11/28

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