Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Michael X. Yang0
Shawming Ma0
Shuang Meng0
Date of Patent
March 29, 2022
Patent Application Number
16208003
Date Filed
December 3, 2018
Patent Citations Received
Patent Primary Examiner
Processes and apparatuses for the treatment of semiconductor workpieces are provided. In some embodiments, a method can include placing the workpiece into a process chamber; vaporizing a solvent to create a vaporized solvent; introducing the vaporized solvent into the process chamber; and exposing the workpiece to the vaporized solvent.
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