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US Patent 11289637 Transmon qubits with trenched capacitor structures
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Patent
Date Filed
April 11, 2019
Date of Patent
March 29, 2022
Patent Application Number
16381563
Patent Citations
US Patent 10134972 Qubit and coupler circuit structures and coupling techniques
US Patent 10068184 Vertical superconducting capacitors for transmon qubits
US Patent 10068181 Microwave integrated quantum circuits with cap wafer and methods for making the same
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
11289637
Patent Primary Examiner
Eric A. Ward
CPC Code
H01L 39/025
H01L 39/045
H01L 39/12
H01L 39/223
H01L 39/2403
G06N 10/00
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