US Patent 11293422 Methods and systems for cooling a vacuum pump

A system comprises: a vacuum chamber disposed within a housing and having a vacuum port; a vacuum pump within the housing and having a gas inlet port that is fluidically coupled to the vacuum port; and a fluid circuit that comprises: one or more fluidic tubing lines, channels or conduits in thermal contact with a housing of the vacuum pump; a liquid pump fluidically coupled to an inlet of the one or more fluidic tubing lines, channels or conduits; and a heat exchanger having a heat exchanger inlet and a heat exchanger outlet, wherein the heat exchanger inlet is fluidically coupled to an outlet of the one or more fluidic tubing lines, channels or conduits and the heat exchanger outlet is fluidically coupled to the liquid pump. The fluid circuit may also include a portion that is in thermal contact with the vacuum chamber.