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US Patent 11296029 Semiconductor device and method of fabricating same
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Patent
Current Assignee
Samsung
Date Filed
August 31, 2020
Date of Patent
April 5, 2022
Patent Applicant
Samsung
Patent Application Number
17007265
Patent Citations
US Patent 10121874 Self-aligned bottom up gate contact and top down source-drain contact structure in the premetallization dielectric or interlevel dielectric layer of an integrated circuit
US Patent 10204994 Methods of forming a semiconductor device with a gate contact positioned above the active region
US Patent 10347744 Method and structure of forming FinFET contact
US Patent 10388747 Gate contact structure positioned above an active region with air gaps positioned adjacent the gate structure
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
11296029
Patent Primary Examiner
Tong-Ho Kim
CPC Code
H01L 21/32139
H01L 21/76805
H01L 21/76895
H01L 29/0673
H01L 29/0847
H01L 29/41733
H01L 29/41791
H01L 29/42392
H01L 29/7851
H01L 29/78618
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