Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
April 12, 2022
Patent Application Number
16410651
Date Filed
May 13, 2019
Patent Citations Received
Patent Primary Examiner
An injection apparatus for injection material is disclosed. The injection apparatus includes a tank for storing material. The injection apparatus further includes a head body that has a surface for contacting a substrate and an opening part opened at the surface for discharging the material in fluid-communication with the tank. The injection apparatus further includes a member connected to the opening part, in which the member allows gas to flow into and flow out from the opening part.
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