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US Patent 11307548 Signal and event processing engine
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Patent
Date Filed
December 20, 2018
Date of Patent
April 19, 2022
Patent Application Number
16957074
Patent Citations Received
US Patent 12092965 Process variability aware adaptive inspection and metrology
0
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
11307548
Patent Primary Examiner
Tuan C Dao
CPC Code
G05B 19/054
G05B 19/4185
Y02P 90/02
G05B 19/042
G06F 16/24568
G05B 19/05
G05B 19/0421
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