US Patent 11309347 Integrated circuit photodetector
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Chun-Wei Hsu0
Chung-Yu Lin0
Tsai-Hao Hung0
Ying-Hsun Chen0
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US Patent 11309347 Integrated circuit photodetector
Article
An integrated circuit includes a photodetector. The photodetector includes one or more dielectric structures positioned in a trench in a semiconductor substrate. The photodetector includes a photosensitive material positioned in the trench and covering the one or more dielectric structures. A dielectric layer covers the photosensitive material. The photosensitive material has an index of refraction that is greater than the indices of refraction of the dielectric structures and the dielectric layer.
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Patent number
11309347
Date of patent
April 19, 2022
Patent application number
16788145
Date Filed
February 11, 2020
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