Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Jingyun Zhang0
Tian Shen0
Ruilong Xie0
Kevin W. Brew0
Heng Wu0
Date of Patent
April 26, 2022
0Patent Application Number
168216600
Date Filed
March 17, 2020
0Patent Citations
Patent Primary Examiner
A phase change material switch includes a phase change layer disposed on a metal liner. A gate dielectric layer is disposed on the phase change layer. A metal gate liner is disposed on the gate dielectric layer.
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