Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Peter Nicholas Russo0
Christopher Vincent Poulton0
Ehsan Shah Hosseini0
Michael Robert Watts0
Benjamin Roy Moss0
Date of Patent
May 3, 2022
0Patent Application Number
169942260
Date Filed
August 14, 2020
0Patent Primary Examiner
A plurality of waveguide structures are formed in at least one silicon layer of a first member. The first member includes: a first surface of a first silicon dioxide layer that is attached to a second member that consists essentially of an optically transmissive material having a thermal conductivity less than about 50 W/(m·K), and a second surface of material that was deposited over at least some of the plurality of waveguide structures. An array of phase shifters is formed in one or more layers of the first member. An array of temperature controlling elements are in proximity to the array of phase shifters.
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