US Patent 11320742 Method and system for generating photomask patterns
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Edits on 25 Mar, 2023
Golden AI
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Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
113207420
Date of Patent
May 3, 2022
0Patent Application Number
164334920
Date Filed
June 6, 2019
0Patent Citations
Patent Primary Examiner
CPC Code
Edits on 22 Mar, 2023
Golden AI
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Edits on 28 Sep, 2022
Golden AI
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Edits on 27 Sep, 2022
Golden AI
Infobox
Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
113207420
Date of Patent
May 3, 2022
0Patent Application Number
164334920
Date Filed
June 6, 2019
0Patent Citations
Patent Primary Examiner
CPC Code
Edits on 19 May, 2022
Golden AI
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Article (+393 characters)
US Patent 11320742 Method and system for generating photomask patterns
Article
The present disclosure provides a method and a system for generating photomask patterns. The system obtains a design layout image, and generates a hotspot image corresponding to the design layout image based on a hotspot detection model. The system generates two photomask patterns based on the hotspot image. The at least two photomask patterns are transferred onto a semiconductor substrate.
Infobox
Is a
Patent applicant
Current assignee
Patent jurisdiction
Patent number
11320742
Date of patent
May 3, 2022
Patent application number
16433492
Date Filed
June 6, 2019
Patent citations
Patent primary examiner
CPC Code
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