Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Ruichao Zhu0
Steven R. J. Brueck0
Juan Jose Faria Briceno0
Date of Patent
May 10, 2022
0Patent Application Number
170535850
Date Filed
May 6, 2019
0Patent Citations
Patent Primary Examiner
A system for measuring a periodic array of structures on a sample is provided. The system includes an optical source configured to produce an optical beam; an optical system configured to control the polarization of the optical beam and to focus the optical beam with a first NA
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