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US Patent 11329167 Fishbone long channel nanosheet device
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Patent
Date Filed
January 8, 2020
Date of Patent
May 10, 2022
Patent Application Number
16736898
Patent Citations
US Patent 10177235 Nano-sheet transistors with different threshold voltages
US Patent 10170549 Strained stacked nanosheet FETs and/or quantum well stacked nanosheet
US Patent 10170584 Nanosheet field effect transistors with partial inside spacers
US Patent 10037885 Atomic layer deposition sealing integration for nanosheet complementary metal oxide semiconductor with replacement spacer
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
11329167
Patent Primary Examiner
Cheung Lee
CPC Code
H01L 21/02603
H01L 21/3065
H01L 21/823412
H01L 21/823431
H01L 21/823437
H01L 21/823481
H01L 21/823487
H01L 21/823807
H01L 21/823821
H01L 21/823828
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