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US Patent 11335685 Semiconductor memory device
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Patent
Date Filed
November 25, 2019
Date of Patent
May 17, 2022
Patent Applicant
Samsung
Patent Application Number
16693889
Patent Citations
US Patent 10068917 Vertical memory devices and methods of manufacturing the same
0
US Patent 10784272 Semiconductor memory devices
US Patent 10008265 Method and apparatus for providing three-dimensional integrated nonvolatile memory (NVM) and dynamic random access memory (DRAM) memory device
US Patent 10096610 Polysilicon doping controlled 3D NAND etching
0
Patent Citations Received
US Patent 11652148 Method of selective film deposition and semiconductor feature made by the method
0
US Patent 12094935 Method of selective film deposition and semiconductor feature made by the method
0
Patent Inventor Names
Hyun Jung Lee
0
Hyung Joon Kim
0
Yong-Hoon Son
0
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
11335685
Patent Primary Examiner
Shouxiang Hu
CPC Code
H01L 27/11521
H01L 27/11551
H01L 27/11568
H01L 27/11578
H01L 27/10805
H01L 27/10808
H01L 27/1052
H01L 27/1085
H01L 27/108
H01L 27/11565
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