US Patent 11335828 Method of handling micro device
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Edits on 28 Apr, 2023
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Patent Jurisdiction
Patent Number
113358280
Date of Patent
May 17, 2022
0Patent Application Number
167067760
Date Filed
December 8, 2019
0Patent Citations
Patent Primary Examiner
Golden AI
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Edits on 24 Mar, 2023
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Edits on 27 Sep, 2022
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Edits on 22 Sep, 2022
Golden AI
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Patent Jurisdiction
Patent Number
113358280
Date of Patent
May 17, 2022
0Patent Application Number
167067760
Date Filed
December 8, 2019
0Patent Citations
Patent Primary Examiner
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US Patent 11335828 Method of handling micro device
Article
A method of handling a micro device is provided. The method includes: holding the micro device by a transfer head; forming a liquid layer between the micro device and a substrate; maintaining a first temperature of the transfer head to be lower than an environmental temperature; maintaining a second temperature of the substrate to be lower than the environmental temperature; and binding the micro device to the substrate by the liquid layer.
Infobox
Is a
Patent jurisdiction
Patent number
11335828
Date of patent
May 17, 2022
Patent application number
16706776
Date Filed
December 8, 2019
Patent citations
Patent primary examiner
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