US Patent 11340124 Piezoresistive sensor for detecting a physical disturbance

A sensor includes a plurality of piezoresistive elements and a plurality of electrical connection terminals. The plurality of piezoresistive elements are fabricated on a first side of a substrate. A second side of the substrate is configured to be coupled to an object where a physical disturbance is to be detected. A plurality of electrical connection terminals are coupled to the first side of the substrate.