US Patent 11346657 Measurement modes for overlay
Patent 11346657 was granted and assigned to KLA on May, 2022 by the United States Patent and Trademark Office.
Is a
Date Filed
October 12, 2020
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Date of Patent
May 31, 2022
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Patent Application Number
17068328
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Patent Inventor Names
Gilad Laredo
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Amnon Manassen
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Andrew V. Hill
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
CPC Code
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