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US Patent 11348938 Methods of manufacturing a vertical memory device
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Patent
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Date Filed
June 19, 2019
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Date of Patent
May 31, 2022
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Patent Applicant
Samsung
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Patent Application Number
16446028
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Patent Citations Received
US Patent 12029034 Semiconductor storage device and manufacturing method thereof
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Patent Inventor Names
Hee-Sook Park
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Sang-Gi An
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Ji-Woon Im
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Il-Woo Kim
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Ik-Soo Kim
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Hyun-Gon Pyo
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
11348938
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Patent Primary Examiner
Marcos D. Pizarro-Crespo
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CPC Code
H01L 27/11524
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H01L 29/66825
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H01L 29/66833
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H01L 21/02164
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H01L 21/32055
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H01L 27/1157
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H01L 27/11563
0
H01L 27/11582
0
H01L 27/11565
0
H01L 21/31111
0
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