US Patent 11349108 Array substrate and manufacturing method thereof, and display panel

The present invention provides an array substrate and a manufacturing method thereof, and a display panel. The manufacturing method of the array substrate includes following steps of: providing a base, wherein the base comprises a non-display region; forming an inorganic film set layer on the base; forming an opening on the inorganic film set layer and forming a patterned source-drain layer, wherein the opening is disposed in the non-display region, and the source-drain layer does not cover or fill the opening; and forming an organic planarization layer on the inorganic film set layer, wherein the organic planarization layer covers the source-drain layer and fills and covers the opening.