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US Patent 11355641 Merged source/drain features
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Patent
Date Filed
March 15, 2021
Date of Patent
June 7, 2022
Patent Application Number
17201147
Patent Citations Received
US Patent 11961912 Merged source/drain features
0
Patent Inventor Names
Feng-Cheng Yang
0
Wei-Yuan Lu
0
Tzu-Ching Lin
0
Li-Li Su
0
Chun-An Lin
0
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
11355641
Patent Primary Examiner
Thinh T Nguyen
CPC Code
H01L 21/823878
H01L 27/1104
H01L 21/02532
H01L 29/785
H01L 21/823821
H01L 27/0924
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