Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Shashidhara Patel0
Ribhu Gautam0
Ananthkrishna Jupudi0
Date of Patent
June 14, 2022
0Patent Application Number
161984170
Date Filed
November 21, 2018
0Patent Citations Received
Patent Primary Examiner
Methods and apparatus for supporting substrates are provided herein. In some embodiments, a substrate support for supporting a plurality of substrates includes: a plurality of substrate support elements having a ring shape configured to support a plurality of substrates in a vertically spaced apart relation; and a plurality of substrate lift elements interfacing with the plurality of substrate support elements and configured to simultaneously selectively raise or lower substrates off of or onto respective substrate support elements.
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