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US Patent 11362067 Methods of manufacturing semiconductor devices
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Is a
Patent
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Date Filed
April 22, 2020
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Date of Patent
June 14, 2022
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Patent Applicant
Samsung
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Patent Application Number
16855352
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Patent Citations Received
US Patent 11698310 Slotted MEMS force sensor
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Patent Inventor Names
Pilkyu Kang
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Seokho Kim
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Yikoan Hong
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Kyuha Lee
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Kwangjin Moon
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Joohee Jang
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Jaehyung Park
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Hoonjoo Na
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
11362067
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Patent Primary Examiner
Dale E Page
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CPC Code
H01L 25/065
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H01L 2224/94
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H01L 2224/80986
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H01L 25/0657
0
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