Log in
Sign up
Golden has been acquired by ComplyAdvantage.Read about it here ⟶
‌

US Patent 11366072 Detecting backscattered electrons in a multibeam charged particle column

OverviewStructured DataIssuesContributorsActivity

All edits

Edits on 29 May, 2024
"update inverses"
Golden AI profile picture
Golden AI
edited on 29 May, 2024
Edits made to:
Infobox (+1 properties)
Infobox
Patent Citations Received
‌
US Patent 11996265 System and method for generating and analyzing roughness measurements and their use for process monitoring and control
0
Edits on 7 Jun, 2023
"update inverses"
Golden AI profile picture
Golden AI
edited on 7 Jun, 2023
Edits made to:
Infobox (+1 properties)
Infobox
Patent Citations Received
‌
US Patent 11670480 System and method for generating and analyzing roughness measurements
0
Edits on 31 May, 2023
"update inverses"
Golden AI profile picture
Golden AI
edited on 31 May, 2023
Edits made to:
Infobox (+1 properties)
Infobox
Patent Citations Received
‌
US Patent 11664188 Edge detection system
0
Edits on 27 Apr, 2023
"update citations for inverse infoboxes"
Golden AI profile picture
Golden AI
edited on 27 Apr, 2023
Edits on 26 Apr, 2023
"Entity importer update"
Golden AI profile picture
Golden AI
edited on 26 Apr, 2023
Infobox
Is a
Patent
Patent
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
113660720
Date of Patent
June 21, 2022
0
Patent Application Number
168663290
Date Filed
May 4, 2020
0
Patent Citations
‌
US Patent 10236156 Apparatus of plural charged-particle beams
0
‌
US Patent 10325753 Method and system for focus adjustment of a multi-beam scanning electron microscopy system
0
‌
US Patent 10347460 Patterned substrate imaging using multiple electron beams
0
‌
US Patent 10366862 Method and system for noise mitigation in a multi-beam scanning electron microscopy system
0
‌
US Patent 10460905 Backscattered electrons (BSE) imaging using multi-beam tools
0
‌
US Patent 10811222 Apparatus of plural charged-particle beams
0
Patent Primary Examiner
‌
Wyatt A Stoffa
0
CPC Code
‌
G01N 23/203
0
‌
G01N 2223/6116
0
‌
H01J 2237/24475
0
‌
H01J 2237/24465
0
Edits on 6 Apr, 2023
"update citations for inverse infoboxes"
Golden AI profile picture
Golden AI
edited on 6 Apr, 2023
Edits on 30 Mar, 2023
"update citations for inverse infoboxes"
Golden AI profile picture
Golden AI
edited on 30 Mar, 2023
Edits on 22 Mar, 2023
"update citations for inverse infoboxes"
Golden AI profile picture
Golden AI
edited on 22 Mar, 2023
Edits on 27 Sep, 2022
"update citations for inverse infoboxes"
Golden AI profile picture
Golden AI
edited on 27 Sep, 2022
Edits on 26 Sep, 2022
"Entity importer update"
Golden AI profile picture
Golden AI
edited on 26 Sep, 2022
Infobox
Is a
Patent
Patent
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
113660720
Date of Patent
June 21, 2022
0
Patent Application Number
168663290
Date Filed
May 4, 2020
0
Patent Citations
‌
US Patent 10236156 Apparatus of plural charged-particle beams
0
‌
US Patent 10325753 Method and system for focus adjustment of a multi-beam scanning electron microscopy system
0
‌
US Patent 10347460 Patterned substrate imaging using multiple electron beams
0
‌
US Patent 10366862 Method and system for noise mitigation in a multi-beam scanning electron microscopy system
0
‌
US Patent 10460905 Backscattered electrons (BSE) imaging using multi-beam tools
0
‌
US Patent 10811222 Apparatus of plural charged-particle beams
0
Patent Primary Examiner
‌
Wyatt A Stoffa
0
CPC Code
‌
G01N 23/203
0
‌
G01N 2223/6116
0
‌
H01J 2237/24475
0
‌
H01J 2237/24465
0
"update citations for inverse infoboxes"
Golden AI profile picture
Golden AI
edited on 26 Sep, 2022
Edits on 25 Sep, 2022
"update citations for inverse infoboxes"
Golden AI profile picture
Golden AI
edited on 25 Sep, 2022
Edits on 23 Sep, 2022
"update citations for inverse infoboxes"
Golden AI profile picture
Golden AI
edited on 23 Sep, 2022
Edits on 22 Jun, 2022
"Created via: Entity Importer"
Golden AI profile picture
Golden AI
created this topic on 22 Jun, 2022
Edits made to:
Infobox (+17 properties)
Article (+92 characters)
‌

 US Patent 11366072 Detecting backscattered electrons in a multibeam charged particle column

Article

A method and a system for detecting backscattered electrons in a multi-beam electron column.

Infobox
Is a
Patent
Patent
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
11366072
Date of patent
June 21, 2022
Patent application number
16866329
Date Filed
May 4, 2020
Patent citations
‌
US Patent 10236156 Apparatus of plural charged-particle beams
‌
US Patent 10325753 Method and system for focus adjustment of a multi-beam scanning electron microscopy system
‌
US Patent 10347460 Patterned substrate imaging using multiple electron beams
‌
US Patent 10366862 Method and system for noise mitigation in a multi-beam scanning electron microscopy system
‌
US Patent 10460905 Backscattered electrons (BSE) imaging using multi-beam tools
‌
US Patent 10811222 Apparatus of plural charged-particle beams
Patent primary examiner
‌
Wyatt A Stoffa
CPC Code
‌
G01N 23/203
‌
G01N 2223/6116
‌
H01J 2237/24475
‌
H01J 2237/24465

Find more entities like US Patent 11366072 Detecting backscattered electrons in a multibeam charged particle column

Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
Open Query Tool
Access by API
Golden Query Tool
Golden logo