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US Patent 11367989 Light emitting unit and light source device
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Patent
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Date Filed
December 21, 2020
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Date of Patent
June 21, 2022
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Patent Application Number
17129755
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Patent Citations
US Patent 10420197 Radiation source, metrology apparatus, lithographic system and device manufacturing method
US Patent 10186416 Apparatus and a method for operating a variable pressure sealed beam lamp
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US Patent 10186414 Dual parabolic laser driven sealed beam lamps
US Patent 10109473 Mechanically sealed tube for laser sustained plasma lamp and production method for same
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US Patent 10057973 Electrodeless single low power CW laser driven plasma lamp
US Patent 10032622 Light source device
US Patent 10032620 Broadband light source including transparent portion with high hydroxide content
US Patent 10609804 Laser driven lamp
US Patent 10561008 Laser driven lamp
US Patent 10504714 Dual parabolic laser driven sealed beam lamp
Patent Citations Received
US Patent 11664211 Light emitting sealed body, light source device, and method for driving light emitting sealed body
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US Patent 11670497 Light emitting sealed body and light source device
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US Patent 11676809 Light emitting sealed body and light source device
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US Patent 11682548 Light emitting sealed body and light source device
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Patent Inventor Names
Akio Suzuki
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Akinori Asai
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Yusei Nagata
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Toru Fujita
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Stephen F. Horne
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Shinichi Ohba
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Ron Collins
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Matthew Partlow
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Laura Owens
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
11367989
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Patent Primary Examiner
Xinning(Tom) Niu
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CPC Code
H01S 3/038
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H01S 3/034
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H01S 3/09702
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H05H 1/24
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H05G 2/008
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