Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
July 5, 2022
Patent Application Number
17023474
Date Filed
September 17, 2020
Patent Citations
Patent Primary Examiner
A method, system and program for determining a fingerprint of a parameter. The method includes determining a contribution from a device out of a plurality of devices to a fingerprint of a parameter. The method includes obtaining parameter data and usage data, wherein the parameter data is based on measurements for multiple substrates having been processed by the plurality of devices, and the usage data indicates which of the devices out of the plurality of the devices were used in the processing of each substrate; and determining the contribution using the usage data and parameter data.
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