US Patent 11391870 Height-modulated diffractive master plate and method of manufacturing thereof
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Patent Number
113918700
Date of Patent
July 19, 2022
0Patent Application Number
166181780
Date Filed
May 18, 2018
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Patent Number
113918700
Date of Patent
July 19, 2022
0Patent Application Number
166181780
Date Filed
May 18, 2018
0Patent Citations
Patent Primary Examiner
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US Patent 11391870 Height-modulated diffractive master plate and method of manufacturing thereof
Article
The invention relates to a method of fabricating a master plate for producing diffractive structures and a master plate obtainable therewith. The method comprises providing a substrate having a periodic surface profile, filling the surface profile uniformly at least partly with filling material, and partially removing the filling material in order to produce a master plate having a periodic height-modulated surface profile formed by said substrate and said filling material. The invention allows for producing master plates capable of further producing gratings with variable diffraction efficiency.
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Patent applicant
Current assignee
Patent jurisdiction
Patent number
11391870
Date of patent
July 19, 2022
Patent application number
16618178
Date Filed
May 18, 2018
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Patent primary examiner
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