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US Patent 11396030 Mask frame assembly for depositing thin film
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Patent
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Date Filed
August 6, 2019
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Date of Patent
July 26, 2022
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Patent Applicant
Samsung
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Patent Application Number
16533709
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Patent Citations
US Patent 10147880 Mask for thin film deposition and method of manufacturing oled using the same
Patent Citations Received
US Patent 11608554 Deposition mask apparatus, mask support mechanism, and production method for deposition mask apparatus
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US Patent 11788181 Deposition mask apparatus, mask support mechanism, and production method for deposition mask apparatus
US Patent 11930690 Mask plate
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Patent Inventor Names
Jongdae Lee
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Youngeun Ryu
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Yalim Kim
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Sangheon Jeon
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
11396030
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Patent Primary Examiner
Laura Edwards
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CPC Code
C23C 14/042
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C23C 14/24
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C23C 16/042
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H01L 27/3244
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H01L 51/56
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H01L 51/0011
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H01L 21/67017
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G03F 1/66
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G03F 7/70691
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B05C 17/06
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