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US Patent 11398553 Source/drain features
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Current Assignee
Taiwan Semiconductor Manufacturing Company
Date Filed
November 20, 2020
Date of Patent
July 26, 2022
Patent Applicant
Taiwan Semiconductor Manufacturing Company
Patent Application Number
17100543
Patent Citations
US Patent 11171136 Semiconductor devices
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
11398553
Patent Primary Examiner
Earl N Taylor
CPC Code
H01L 29/6681
H01L 29/66818
H01L 29/7851
H01L 29/7855
H01L 2029/7858
H01L 29/42392
H01L 23/5226
H01L 23/528
H01L 23/535
H01L 29/6656
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