US Patent 11404254 Insertable target holder for solid dopant materials
Patent 11404254 was granted and assigned to Varian Semiconductor Equipment Associates on August, 2022 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
February 6, 2019
0
Date of Patent
August 2, 2022
0
Patent Applicant
Patent Application Number
16269120
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Patent Inventor Names
Daniel Alvarado
0
Shreyansh Patel
0
Klaus Becker
0
Graham Wright
0
Daniel R. Tieger
0
Stephen Krause
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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