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US Patent 11415821 Electro-optic modulators with stacked layers

Patent 11415821 was granted and assigned to GlobalFoundries on August, 2022 by the United States Patent and Trademark Office.

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Structures for an electro-optic modulator and methods of fabricating a structure for an electro-optic modulator. The electro-optic modulator has a layer stack arranged over a section of a waveguide core. The layer stack includes a first layer, a second layer, and a third layer. The first layer, the second layer, and the third layer are each composed of either copper or indium-tin oxide.

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