US Patent 11415883 Microlithographic fabrication of structures
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Edits on 27 Mar, 2023
Golden AI
Infobox
Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
114158830
Date of Patent
August 16, 2022
0Patent Application Number
170729910
Date Filed
October 16, 2020
0Patent Citations
Patent Primary Examiner
Edits on 22 Sep, 2022
Golden AI
Infobox
Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
114158830
Date of Patent
August 16, 2022
0Patent Application Number
170729910
Date Filed
October 16, 2020
0Patent Citations
Patent Primary Examiner
Edits on 17 Aug, 2022
Golden AI
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Article (+405 characters)
US Patent 11415883 Microlithographic fabrication of structures
Article
Asymmetric structures formed on a substrate and microlithographic methods for forming such structures. Each of the structures has a first side surface and a second side surface, opposite the first side surface. A profile of the first side surface is asymmetric with respect to a profile of the second side surface. The structures on the substrate are useful as a diffraction pattern for an optical device.
Infobox
Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
11415883
Date of Patent
August 16, 2022
Patent Application Number
17072991
Date Filed
October 16, 2020
Patent Citations
Patent Primary Examiner
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