Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
An-Shen Chang0
Chung-Te Lin0
Han-Ting Tsai0
Qiang Fu0
Tai-Yen Peng0
Yu-Feng Yin0
Date of Patent
August 16, 2022
Patent Application Number
17008000
Date Filed
August 31, 2020
Patent Citations
Patent Primary Examiner
The present disclosure provides a semiconductor structure, including a substrate, including a first region and a second region adjacent to the first region, a magnetic tunnel junction (MTJ) over the first region, a spacer on a sidewall of the MTJ, a hard mask over the MTJ, a first dielectric layer laterally surrounding the spacer and the hard mask, a top electrode over the hard mask, and an etch stop stack laterally surrounding the top electrode.
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