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US Patent 11424182 Semiconductor device
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Patent
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Date Filed
December 22, 2020
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Date of Patent
August 23, 2022
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Patent Applicant
Samsung
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Patent Application Number
17130293
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Patent Citations
US Patent 10514598 Vacuum-integrated hardmask processes and apparatus
US Patent 10475739 Semiconductor device
US Patent 11127789 Magnetic memory devices
Patent Citations Received
US Patent 11764149 Semiconductor device
Patent Inventor Names
Suhyun Bark
0
Jangho Lee
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Wookyung You
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Deokyoung Jung
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Kyeongbeom Park
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Jongmin Baek
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
11424182
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Patent Primary Examiner
Laura M Menz
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CPC Code
H01L 23/528
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H01L 27/088
0
H01L 23/5226
0
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