Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
September 20, 2022
0Patent Application Number
168863210
Date Filed
May 28, 2020
0Patent Citations
Patent Primary Examiner
An apparatus for treating a substrate includes a housing having a treatment space therein, a plate that supports the substrate in the housing, a heating unit having a heating wire that is provided inside the plate and that heats the substrate, a main temperature sensor that directly measures temperatures of the plate, and an auxiliary temperature sensor that measures temperatures of the heating wire.
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