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US Patent 11460869 Fluid control system and flow rate measurement method

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Is a

Patent

Patent attributes

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

114608690

Patent Inventor Names

Masaaki Nagase0

Yohei Sawada0

Satoru Yamashita0

Nobukazu Ikeda0

Kouji Nishino0

Date of Patent

October 4, 2022

Patent Application Number

166346030

Date Filed

July 24, 2018

Patent Citations

‌

US Patent 10054959 Real time diagnostics for flow controller systems and methods

Patent Primary Examiner

‌

Reinaldo Sanchez-Medina

CPC Code

A fluid control system (

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