Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
October 4, 2022
Patent Application Number
16422434
Date Filed
May 24, 2019
Patent Citations
Patent Primary Examiner
Embodiments of staircase structures of a three-dimensional memory device and fabrication method thereof are disclosed. The semiconductor structure includes a first and a second film stacks, wherein the first film stack is disposed over the second film stack and has M
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