Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
October 18, 2022
Patent Application Number
16337856
Date Filed
September 21, 2017
Patent Citations Received
Patent Primary Examiner
A diagnostic system of a substrate transfer hand including a base part coupled to a hand tip portion of a robot arm and a substrate holding part coupled to the base part to hold a substrate, includes a camera which is secured to the base part and takes an image of the substrate holding part; and a diagnostic device which obtains image information of the image taken by the camera and diagnoses normality of the substrate holding part based on the image information.
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