Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Mark Edward Schlarmann0
Stephen Ryan Hooper0
Scott M. Hayes0
Michael B. Vincent0
Julien Juéry0
Date of Patent
November 15, 2022
0Patent Application Number
167445770
Date Filed
January 16, 2020
0Patent Citations
Patent Primary Examiner
A no-gel sensor package is disclosed. In one embodiment, the package includes a microelectromechanical system (MEMS) die having a first substrate, which in turn includes a first surface on which is formed a MEMS device. The package also includes a polymer ring with an inner wall extending between first and second oppositely facing surfaces. The first surface of the polymer ring is bonded to the first surface of the first substrate to define a first cavity in which the MEMS device is contained. A molded compound body having a second cavity that is concentric with the first cavity, enables fluid communication between the MEMS device and an environment external to the package.
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