Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Jerry D. Leonhard0
Ray Young0
Benjamin Shafer0
David P. Surdock0
Jeffrey Chi Cheung0
John Ghekiere0
Date of Patent
November 15, 2022
0Patent Application Number
155878400
Date Filed
May 5, 2017
0Patent Citations Received
Patent Primary Examiner
A substrate etching system includes a support to hold a wafer in a face-up orientation, a dispenser arm movable laterally across the wafer on the support, the dispenser arm supporting a delivery port to selectively dispense a liquid etchant onto a portion of a top face of the wafer, and a monitoring system comprising a probe movable laterally across the wafer on the support.
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