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US Patent 11502214 Photodetectors used with broadband signal
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Patent
Current Assignee
GlobalFoundries
Date Filed
March 9, 2021
Date of Patent
November 15, 2022
Patent Applicant
GlobalFoundries
Patent Application Number
17196756
Patent Citations
US Patent 10393960 Waveguides with multiple-level airgaps
US Patent 10157947 Photonic lock based high bandwidth photodetector
US Patent 10446643 Sealed cavity structures with a planar surface
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
11502214
Patent Primary Examiner
Earl N Taylor
CPC Code
H01L 27/14645
H01L 31/105
H01L 31/1804
H01L 31/035281
H01L 27/14643
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