US Patent 11509277 Piezoelectric single crystal silicon carbide microelectromechanical resonators
Patent 11509277 was granted and assigned to Hrl Laboratories, Llc on November, 2022 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
March 28, 2019
Date of Patent
November 22, 2022
Patent Applicant
Patent Application Number
16368802
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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