Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Xinhai Han0
Thomas Kwon0
Date of Patent
November 29, 2022
0Patent Application Number
167206430
Date Filed
December 19, 2019
0Patent Citations
Patent Primary Examiner
CPC Code
Methods of forming 3D NAND devices are discussed. Some embodiments form 3D NAND devices with increased cell density. Some embodiments form 3D NAND devices with decreased vertical and/or later pitch between cells. Some embodiments form 3D NAND devices with smaller CD memory holes. Some embodiments form 3D NAND devices with silicon layer between alternating oxide and nitride materials.
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