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US Patent 11529592 Gas injector with baffle
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Is a
Patent
Current Assignee
Applied Materials
Date Filed
July 1, 2021
Date of Patent
December 20, 2022
Patent Applicant
Applied Materials
Patent Application Number
17365791
Patent Citations
US Patent 10840066 Adjustable fastening device for plasma gas injectors
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
11529592
Patent Primary Examiner
Rudy Zervigon
CPC Code
B01J 4/002
B01J 4/007
B01J 8/22
B01J 2208/00902
B01J 2208/00929
C23C 16/45563
C23C 16/45578
C23C 16/45565
C23C 16/45561
C23C 16/45574
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