US Patent 11532455 Plasma generating apparatus and method for operating same
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Patent Number
115324550
Date of Patent
December 20, 2022
0Patent Application Number
169739940
Date Filed
December 27, 2019
0Patent Citations
Patent Primary Examiner
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US Patent 11532455 Plasma generating apparatus and method for operating same
Article
A plasma generating apparatus according to an embodiment of the present invention comprises: a pair of electrodes arranged in a dielectric discharge tube; an initial discharge induction coil module; and a main discharge induction coil module. The initial discharge induction coil module and the main discharge induction coil module are connected to an RF power source, and the RF power source provides RF power having different resonance frequencies to the initial discharge induction coil module and the main discharge induction coil module, respectively.
Infobox
Is a
Patent Jurisdiction
Patent Number
115324550
Date of Patent
December 20, 2022
0Patent Application Number
169739940
Date Filed
December 27, 2019
0Patent Citations
Patent Primary Examiner
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