US Patent 11543051 Vacuum valve with position sensor
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Edits on 25 Apr, 2023
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Patent Jurisdiction
Patent Number
115430510
Date of Patent
January 3, 2023
0Patent Application Number
166271520
Date Filed
June 28, 2018
0Patent Citations
Patent Primary Examiner
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US Patent 11543051 Vacuum valve with position sensor
Article
Disclosed is a vacuum valve having a valve closure and having a drive unit which is coupled to the valve closure and which has at least one adjustment element. The vacuum valve furthermore has a position sensor, in particular a travel or distance sensor, such that a position of the valve closure and/or of the at least one adjustment element relative to a zero position, in particular an open position or closed position of the vacuum valve, can be measured.
Infobox
Is a
Patent Jurisdiction
Patent Number
115430510
Date of Patent
January 3, 2023
0Patent Application Number
166271520
Date Filed
June 28, 2018
0Patent Citations
Patent Primary Examiner
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