Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Tauno Vähä-Heikkilä0
Hannu Kattelus0
Date of Patent
January 10, 2023
0Patent Application Number
166241810
Date Filed
June 15, 2018
0Patent Primary Examiner
CPC Code
A micro structure with a substrate having a top surface; a first electrode with a horizontal orientation parallel to the top surface of the substrate, wherein the first electrode is embedded within the substrate so that a top surface of the first electrode coincides with the top surface of the substrate; a dielectric layer arranged on the top surface of the first electrode; and a second electrode arranged above the dielectric layer.
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