Patent attributes
The present disclosure provides a semiconductor memory device and a manufacturing method thereof, and relates to the technical field of semiconductors. The semiconductor memory device includes a substrate, a source structure, a laminated structure, a floating body, a trench region, a drain structure and a gate structure. The source structure is formed on the substrate. The laminated structure includes a nitride layer and an oxide layer that are alternately laminated on the source structure. The floating body is formed in the oxide layer, and a through hole is formed in the floating body along a lamination direction of the laminated structure. The trench region is formed inside the floating body, a through hole is also formed in the trench region along the lamination direction, and the trench region is in contact with the source structure.
