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US Patent 11557461 Impedance matching network
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Patent
Date Filed
June 10, 2021
Date of Patent
January 17, 2023
Patent Application Number
17344327
Patent Citations
US Patent 10812071 Drive circuit and impedance matching device
US Patent 10269540 Impedance matching system and method of operating the same
US Patent 10483090 Restricted capacitor switching
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
11557461
Patent Primary Examiner
Stephen E. Jones
CPC Code
H01J 2237/24564
H01J 2237/332
H01J 2237/334
H01L 22/14
H01L 22/20
H01L 22/26
H01L 21/02274
H01L 21/28556
H01L 21/31116
H01L 21/31138
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