US Patent 11557954 Transport system, processing system, and article manufacturing method

In a transport system that moves a moving portion, which moves in a transport direction along a fixed portion, while detecting a position of the moving portion by a scale and a sensor, a guide block is installed on a second surface of a first part of the moving portion, a guide rail is installed on a first surface of the fixed portion, the scale is installed at an end of the first part of the moving portion on an opposite side across the guide block, and a sensor that has a detecting unit at a position facing the scale is installed in the fixed portion.