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US Patent 11562990 Systems for direct transfer of semiconductor device die

Patent 11562990 was granted and assigned to Rohinni on January, 2023 by the United States Patent and Trademark Office.

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Contents

Is a
Patent
Patent

Patent attributes

Patent Applicant
Rohinni
Rohinni
Current Assignee
Rohinni
Rohinni
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
11562990
Date of Patent
January 24, 2023
Patent Application Number
16694665
Date Filed
November 25, 2019
Patent Citations
‌
US Patent 10141215 Compliant needle for direct transfer of semiconductor devices
‌
US Patent 10615152 Semiconductor device on glass substrate
‌
US Patent 11094571 Apparatus to increase transferspeed of semiconductor devices with micro-adjustment
‌
US Patent 11183478 Apparatus and method for transferring semiconductor devices from a substrate and stacking semiconductor devices on each other
Patent Primary Examiner
‌
Minh N Trinh
CPC Code
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H01L 21/4853
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H01L 21/67132
‌
H01L 21/67144
‌
H01L 21/67196
‌
H01L 21/67265
‌
H01L 21/67715
‌
H01L 21/67778
‌
H01L 2924/00014
...

A system for performing a direct transfer of a semiconductor device die includes a first conveyance mechanism to convey a first substrate, and a second conveyance mechanism to convey a second substrate with respect to the first substrate. The first substrate includes a first side and a second side, and the semiconductor device die is disposed on the first side of the first substrate. The second conveyance mechanism includes a first portion and a second portion to clamp the second substrate adjacent to a first side of the first substrate. The first portion of the second conveyance mechanism has a concave shape and the second portion of the second conveyance mechanism has a convex counter shape corresponding to the concave shape of the first portion. The system also includes a transfer mechanism disposed adjacent to the first conveyance mechanism to effectuate the direct transfer.

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